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Large-scale Fabrication of Vertically Aligned ZnO

时间:2021-08-24 来源:飒榕旅游网
专利内容由知识产权出版社提供

专利名称:Large-scale Fabrication of Vertically Aligned

ZnO Nanowire Arrays

发明人:Zhong Lin Wang,Youfan Hu,Yan Zhang,Chen

Xu,Guang Zhu

申请号:US13473867申请日:20120517

公开号:US20120293047A1公开日:20121122

专利附图:

摘要:A generator includes a substrate, a first electrode layer, a dense plurality ofvertically-aligned piezoelectric elongated nanostructures, an insulating layer and a

second electrode layer. The substrate has a top surface and the first electrode layer isdisposed on the top surface of the substrate. The dense plurality of vertically-alignedpiezoelectric elongated nanostructures extends from the first electrode layer. Each ofthe nanostructures has a top end. The insulating layer is disposed on the top ends of thenanostructures. The second electrode layer is disposed on the non-conductive layer andis spaced apart from the nanostructures.

申请人:Zhong Lin Wang,Youfan Hu,Yan Zhang,Chen Xu,Guang Zhu

地址:Marietta GA US,Atlanta GA US,Atlanta GA US,Atlanta GA US,Atlanta GA US

国籍:US,US,US,US,US

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